Abstract
Hydro-oleophobic Silica antireflective films with high laser damage threshold were prepared by sol-gel process. The highest water contact angle of 136° and oil (peanut) contact angle of 93° were obtained. The highest optical transmittance and laser damage threshold (351nm, 1ns) were 99.5% and 6 J/cm2 respectively.
© 2009 IEEE
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