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Fabrication technology of a low-loss plasmonic waveguide containing both “plasmonic- friendly” and “plasmonic- unfriendly” metals

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Abstract

Fabrication technology, which allows a substantial decrease of the plasmonic propagation loss for both a “plasmon- friendly” metal like Au, Cu or Al and “plasmon- unfriendly” metal like Co, Fe or Cr, have been developed and experimentally demonstrated. Optimization of the optical confinement is used to reduce the propagation loss below 1 dB per a plasmonic device.

© 2022 IEEE

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