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Conferences > CLEOPR > 2022 > CThP6E > CThP6E_02

Investigation of the effect of grating profile on the precision of 2D single-shot comb-based interferometer

Dinh Thai Bao, Keishi Chiba, Truong Cong Tuan, and Tatsutoshi Shioda

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Abstract

The research theoretically analyzes the system specifications and designs the experiment to verify the effect of the discrete profile of the grating on the profilometry precision of the novel 2D single-shot comb-based interferometer.

© 2022 IEEE

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