Abstract
In this talk, we shall discuss the strategies to integrate silicon photodetector in silicon nitride-on-SOI platform. We shall discuss device design, fabrication challenges and measurement results of detectors for potential sensor and high-speed applications.
© 2022 IEEE
PDF ArticleMore Like This
Avijit Chatterjee and Shankar Kumar Selvaraja
JW1A.134 CLEO: Applications and Technology (CLEO:A&T) 2021
Alexander Senichev, Samuel Peana, Zachariah O. Martin, Omer Yesilyurt, Demid Sychev, Alexei S. Lagutchev, Alexandra Boltasseva, and Vladimir M. Shalaev
FW5F.6 CLEO: QELS_Fundamental Science (CLEO:FS) 2022
Qing Li, Ali A. Eftekhar, Amir H. Atabaki, and Ali Adibi
CM3A.5 CLEO: Science and Innovations (CLEO:S&I) 2012