Abstract
We report on processing the bulk of silicon with infrared ultrashort laser pulses. The localized energy deposition and resulting material modifications enable various applications, from the inscription of waveguides to dicing and semiconductor–metal welding.
© 2022 IEEE
PDF ArticleMore Like This
Stefan Nolte, Namig Alasgarzade, Alessandro Alberucci, Markus Blothe, Chandroth P. Jisha, Gabor Matthäus, and Maxime Chambonneau
BW2A.1 Bragg Gratings, Photosensitivity and Poling in Glass Waveguides and Materials (BGPP) 2022
Pol Sopeña, Andong Wang, Alexandros Mouskeftaras, and David Grojo
JTh6A.4 CLEO: Applications and Technology (CLEO:A&T) 2022
Stefan Nolte
CM_5_1 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2017