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Conferences > CLEOPR > 2022 > CWP10B > CWP10B_02

Cascaded multi-stage directional coupler on silicon-on-insulator

Cheng-Tse Tang, Chewn-Pu Jou, Lan-Chou Cho, Fong-Wei Kuo, Ming-Yang Chung, Tai-Chun Huang, and Yung-Jr Hung

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Abstract

We demonstrate the feasibility of a width-engineered cascaded multi-stage directional coupler on silicon-on-insulator for broadband (within 5% power variation over 100 nm wavelength range) and fabrication tolerant operation (let = 2.5% across 12-inch wafer).

© 2022 IEEE

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