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Conferences > CLEOPR > 2022 > P_CTh7 > P_CTh7_02

Measurement and simulation of micro-machined filters for scattered light suppression in integrated optics

Quinn Palmer, Benjamin Stratton, and Joshua W. Silverstone

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Abstract

Solutions to reducing scattered light is silicon photonic devices is achieved through micro machined, chip scale trench patterns where full die height features promote scattering and diffusion. Device performance is demonstrated through measurement and simulation.

© 2022 IEEE

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