Fabrication and Optical Properties of Aligned Silicon Nanowire Arrays Realized with Thin Silver Film

Yung-Jr Hung; Kai-Chung Wu; San-Liang Lee; Yen-Ting Pan

doi:10.1364/CLEO_AT.2011.JWA72

CLEO:2011 - Laser Applications to Photonic Applications
OSA Technical Digest (CD) (Optica Publishing Group, 2011),
paper JWA72
•https://doi.org/10.1364/CLEO_AT.2011.JWA72

Fabrication and Optical Properties of Aligned Silicon Nanowire Arrays Realized with Thin Silver Film

Yung-Jr Hung, Kai-Chung Wu, San-Liang Lee, and Yen-Ting Pan

CLEO: Applications and Technology 2011

Baltimore, Maryland United States
1–6 May 2011
ISBN: 978-1-55752-910-7

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Towards Applications Joint Poster Session (JWA)

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Y. Hung, K. Wu, S. Lee, and Y. Pan, "Fabrication and Optical Properties of Aligned Silicon Nanowire Arrays Realized with Thin Silver Film," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optica Publishing Group, 2011), paper JWA72.

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Abstract

Silicon nanowire arrays realized by depositing thin silver film before etching are demonstrated to have good material and optical properties. They can provide <0.4% antireflection over >1400-nm wavelength range for large-area silicon samples.

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