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Conferences > CLEO_AT > 2018 > JW2A > JW2A.32

Compact Optomechanical Phase Shifter for Visible Light Integrated Photonics

B. Figeys, R. Van Hoof, P. Neutens, B. Du Bois, G. Brondani Torri, S. Severi, and X. Rottenberg

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Abstract

This paper reports on the development of a CMOS compatible capacitively actuated optomechanical phase shifter for visible light, demonstrated on a 200mm PECVD SiN photonic platform. The phase shifting was demonstrated using Mach-Zehnder interferometers.

© 2018 The Author(s)

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