Abstract
Objective of this work is the development of electrostatically controlled adaptive mirror, which is integrated into silicon chip. Integrated mirror combines the advantages of micro-machined device—low cost, tolerance for mass production, and IC compatibility1-4 with geometrical quality, attributed to traditional optics. Applications as a stand-alone adaptive optical element5,6 as well as adaptive component of integrated optoelectronical device3 may be regarded. Technology of fabrication permits integration of electrostatic actuators together with control electronics, which simplifies the structure of adapative optical system.
© 1994 IEEE
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