Abstract
Diffractive Optical Elements (DOEs) exist for a large range of applications. Usually DOEs are obtained by combining lithographic techniques and etching in order to achieve pre-determined phase patterns. That way, it is possible to shape or split laser beams with very high efficiencies. Indeed for binary element which consist of two phase levels (0 and π) the diffraction efficiency is around 75% and this efficiency can approach 100% for multilevel elements. Various illustrations of DOEs can be found in the literature for example using organic materials like photoresists or inorganic materials such as silica or chalcogenide layers [1].
© 2019 IEEE
PDF ArticleMore Like This
Risto-Pekka Salmio, Jyrki Saarinen, Henri Saarikoski, Jari Turunen, and Ari Tervonen
DMB.5 Diffractive Optics and Micro-Optics (DOMO) 1996
Robin Smith
MB1 Difraction Optics: Design, Fabrication, and Applications (DO) 1992
Debashis Chanda, Ladan Abolghasemi, and Peter R. Herman
CMV7 Conference on Lasers and Electro-Optics (CLEO:S&I) 2006