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Conferences > CLEO_Europe > 2019 > ce_4 > ce_4_5
  • 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper ce_4_5

Four-wave Mixing Parametric Oscillation in Deuterated Silicon Nitride Microresonators Prepared by Low-temperature (100 °C) PECVD Platform

Zeru Wu, Zihan Xu, Yanfeng Zhang, Hui Chen, Yujie Chen, and Siyuan Yu

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Abstract

Conventional hydrogenated silicon nitride (SiN:H) waveguides prepared by PECVD technique at low temperature usually exhibits high optical loss induced by the N-H bond absorption (>1 dB/cm) around C-band telecom wavelengths, which limits its applications in nonlinear integrated photonics. By using hydrogen-free precursors, deuterated silicon nitride (SiN:D) based on PECVD platform provides an effective solution and has been confirmed with promising material performance[1-3].

© 2019 IEEE

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