Abstract

In this paper we demonstrate the fabrication of a true-3D inorganic ceramic with resolution down to the nanoscale (∼100 nm) using a sol-gel resist precursor. This method has an unrestricted free-form capability, control of the fill-factor, and high fabrication throughput. A systematic study of the proposed approach based on ultrafast laser 3D lithography (also know as 2PP, TPP or MPP [1]) of organicinorganic hybrid solgel resin followed by a heat treatment enabled the formation of inorganic amorphous and crystalline composites guided by the composition of the initial resin. The achieved resolution of 100 nm was obtained for 3D patterns of complex free-form architectures. Fabrication throughput of 50·10³ voxels per second is achieved [2]; voxel a single volume element recorded by a single pulse exposure. A post-exposure thermal treatment was used to form a ceramic phase, the composition and structure of which were dependent on the temperature and duration of the heat treatment as revealed by Raman micro-spectroscopy.

© 2019 IEEE