CO2 Detection with Si Slot Waveguide Ring Resonators toward On-chip Specific Gas Sensing

Y. Tomono; H. Hoshi; H. Shimizu

doi:10.1364/CLEO_AT.2019.JTh2A.96

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2019),
paper JTh2A.96
•https://doi.org/10.1364/CLEO_AT.2019.JTh2A.96

CO₂ Detection with Si Slot Waveguide Ring Resonators toward On-chip Specific Gas Sensing

Y. Tomono, H. Hoshi, and H. Shimizu

CLEO: QELS_Fundamental Science 2019

San Jose, California United States
5–10 May 2019
ISBN: 978-1-943580-57-6

From the session
Poster Session III (JTh2A)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Y. Tomono, H. Hoshi, and H. Shimizu, "CO2 Detection with Si Slot Waveguide Ring Resonators toward On-chip Specific Gas Sensing," in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optica Publishing Group, 2019), paper JTh2A.96.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We fabricated a Si slot waveguide ring resonator detecting CO₂ with RI difference of 1.5×10⁻⁴ and sensitivity of 3×10² nm/RIU. The device satisfies both detecting capability and compatibility with biolayer toward on-chip specific gas sensing.

PDF Article

Previous Article Next Article