Abstract
We study noise characteristics of high Q silicon nitride nanomechanical resonators integrated in a nanophotonic circuit. Quality factor up to 2.2 million is measured and an intrinsic frequency noise spectrum with kBT/f dependence is observed.
© 2012 Optical Society of America
PDF ArticleMore Like This
King Yan Fong, Wolfram Pernice, Mo Li, and Hong Tang
CThJ5 CLEO: Science and Innovations (CLEO:S&I) 2011
Xiankai Sun, Jiangjun Zheng, Menno Poot, Chee Wei Wong, and Hong X. Tang
CW3M.1 CLEO: Science and Innovations (CLEO:S&I) 2012
Robinjeet Singh and Thomas P. Purdy
STu4F.6 CLEO: Science and Innovations (CLEO:S&I) 2020