Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEO_SI > 2020 > SF2R > SF2R.7

Transmission Metalens with Fixed-Gap Nanopillars for Immersion Lithography Patterning on 12-inch Glass Wafer

Yuan Hsing Fu, Nanxi Li, Qize Zhong, Yuan Dong, Ting Hu, Dongdong Li, Zhengji Xu, Yanyan Zhou, Keng Heng Lai, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, and Navab Singh

Not Accessible

Your library or personal account may give you access

Abstract

Metalens with fixed-gap nanopillars release fabrication challenges in photolithography on CMOS platform. Their performances are investigated through simulation, and the characterization results of metalens patterned directly on 12-inch glass-wafer via immersion lithography are presented.

© 2020 The Author(s)

PDF Article
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use