Silicon Microring Modulator Driven by Transparent Conductive Oxide Capacitor

Erwen Li; Bokun Zhou; Wei-Che Hsu; Alan X. Wang

doi:10.1364/CLEO_SI.2020.SM2J.2

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2020),
paper SM2J.2
•https://doi.org/10.1364/CLEO_SI.2020.SM2J.2

Silicon Microring Modulator Driven by Transparent Conductive Oxide Capacitor

Erwen Li, Bokun Zhou, Wei-Che Hsu, and Alan X. Wang

CLEO: Science and Innovations 2020

Washington, DC United States
10–15 May 2020
ISBN: 978-1-943580-76-7

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E. Li, B. Zhou, W. Hsu, and A. X. Wang, "Silicon Microring Modulator Driven by Transparent Conductive Oxide Capacitor," in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optica Publishing Group, 2020), paper SM2J.2.

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Abstract

We experimentally demonstrated a novel silicon microring modulator driven by transparent conductive oxide capacitor, achieving a large tuning efficiency of 95 pm/V. Analysis indicates that a potential high-speed operation above 44GHz can be reached.

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