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Conferences > CLEO_SI > 2021 > STu2Q > STu2Q.1

Silicon photonic MEMS phase shifter with μs time constant built on a foundry platform

Pierre Edinger, Kristofer Kristinsson, Carlos Errando-Herranz, Alain Yuji Takabayashi, Hamed Sattari, Niels Quack, Peter Verheyen, Wim Bogaerts, and Kristinn B. Gylfason

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Abstract

MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2π phase shifter with a 1.54 μs time constant and 0.5 dB insertion loss in IMEC’s iSiPP50G platform.

© 2021 The Author(s)

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