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Conferences > COSI > 2016 > CTh1D > CTh1D.3

Simulation of the diffractive optical element under partially spatial coherent illumination

Yang Wu and Damien P. Kelly

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Abstract

In this paper we investigate the behavior of diffractive optical elements (DOE) under partially spatial coherent illumination. We simulate partial coherence using a set of realizations of statistically independent speckle fields. The results indicate that the contrast reduction due partially spatial coherent illumination depends on the feature size of the designed DOE.

© 2016 Optical Society of America

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