Abstract
C3N4 was predicted to have a crystal structure of β-Si3N4, and a hardness superior to that of diamond, and hence become a target attracting scientists all over the world. In the present paper CNX films were successfully prepared by DC magnetron sputtering of pure graphite target in pure nitrogen atmosphere. N/C ratio and the nature of the chemical binding of C-N atoms were analyzed by SEM, TEM, XPS spectroscopy, IR spectroscopy and MPM and was found to be strongly process related.
© 1995 Optical Society of America
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