Abstract
We demonstrate the design, fabrication and experimental characterization of binary phase transmission Diffractive Optical Elements (DOEs) in Single Crystal Diamond substrates for laser welding applications. Top-hat and arbitrary pattern DOE beam shapers were numerically optimized using an Iterative Fourier Transform Algorithm (IFTA). Both near field and far field beam shapers were computed (the latter forming an image with a lens of f = 20 mm). Commercially available Single Crystal Diamond plates (3 mm x 3mm x 0.3 mm) were patterned using hardmask deposition (Al2O3, α-Si), e-beam lithography and crystallographic diamond etching using O2 plasma. The resulting relief patterns were characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The finished DOE was optically characterized using an optical measurement setup at 532 nm wavelength.
© 2019 The Author(s)
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