Ultra-low-loss Single-mode Si3N4 Waveguides with 0.7 dB/m Propagation Loss

Jared F. Bauters; Martijn J. R. Heck; Demis D. John; Ming-Chun Tien; Wenzao Li; Jon S. Barton; Daniel J. Blumenthal; John E. Bowers; Arne Leinse; René G. Heideman

doi:10.1364/ECOC.2011.Th.12.LeSaleve.3

37th European Conference and Exposition on Optical Communications
OSA Technical Digest (CD) (Optica Publishing Group, 2011),
paper Th.12.LeSaleve.3
•https://doi.org/10.1364/ECOC.2011.Th.12.LeSaleve.3

Ultra-low-loss Single-mode Si₃N₄ Waveguides with 0.7 dB/m Propagation Loss

Jared F. Bauters, Martijn J. R. Heck, Demis D. John, Ming-Chun Tien, Wenzao Li, Jon S. Barton, Daniel J. Blumenthal, John E. Bowers, Arne Leinse, and René G. Heideman

European Conference and Exposition on Optical Communications 2011

Geneva Switzerland
18–22 September 2011
ISBN: 978-1-55752-931-2

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SILICON PHOTONICS (Th.12.LeSaleve)

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J. F. Bauters, M. J. R. Heck, D. D. John, M. Tien, W. Li, J. S. Barton, D. J. Blumenthal, J. E. Bowers, A. Leinse, and R. G. Heideman, "Ultra-low-loss Single-mode Si3N4 Waveguides with 0.7 dB/m Propagation Loss," in 37th European Conference and Exposition on Optical Communications, OSA Technical Digest (CD) (Optica Publishing Group, 2011), paper Th.12.LeSaleve.3.

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Abstract

We report an approach to make ultra-low-loss waveguides using fixed-index-contrast stoichiometric Si₃N₄. A record low single-mode propagation loss of 0.70 ± 0.02 dB/m was achieved while multi-mode designs have fundamental mode loss as low as 0.43 ± 0.04 dB/m.

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