Laboratory characterization of soft X-ray optics

Jürgen Probsta; Heike Löchela; Christoph Braigb; Christian Seifertb; Alexei Erkob

doi:10.1364/EUVXRAY.2020.ETh1A.3

OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS)
OSA Technical Digest (Optica Publishing Group, 2020),
paper ETh1A.3
•https://doi.org/10.1364/EUVXRAY.2020.ETh1A.3

Laboratory characterization of soft X-ray optics

Jürgen Probsta, Heike Löchela, Christoph Braigb, Christian Seifertb, and Alexei Erkob

Compact EUV & X-ray Light Sources 2020

Washington, DC United States
16–20 November 2020
ISBN: 978-1-943580-73-6

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Compact Sources, Metrology, and X-ray Optics (ETh1A)

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J. Probsta, H. Löchela, C. Braigb, C. Seifertb, and A. Erkob, "Laboratory characterization of soft X-ray optics," in OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS), L. Assoufid, P. Naulleau, M. Couprie, T. Ishikawa, J. Rocca, C. Haefner, G. Sansone, T. Metzger, F. Quéré, M. Ebrahim-Zadeh, A. Helmy, F. Laurell, and G. Leo, eds., OSA Technical Digest (Optica Publishing Group, 2020), paper ETh1A.3.

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Abstract

We report on the construction and operation of the laboratory-scaled soft X-ray reflectometer at the Institute of Applied Photonics e.V. in Berlin. With a µ m-sized source and flexible high-precision mechanics, the competitive capabilities range from the determination of diffraction efficiencies for variable line space gratings to the characterization of mirrors by an evaluation of the emitted wave front.

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