Abstract
Through simulation design, fabrication and characterization of optical sili- con metasurfaces, we discuss the influence of different nanofabrication errors and propose strategies to optimize the robustness of the fabrication of complex metasurfaces. [1]
© 2021 The Author(s)
PDF Article | Presentation VideoMore Like This
Hyunpil Boo, Yoo Seung Lee, Hangbo Yang, Brian Matthews, Tom G. Lee, and Chee Wei Wong
STu4D.5 CLEO: Science and Innovations (CLEO:S&I) 2021
Matthew R. Miller, Ekaterina Poutrina, Piyush J. Shah, Samuel D. Butler, Michael A. Marciniak, and Augustine M. Urbas
JTh4B.2 Flat Optics: Components to Systems (FLATOPTICS) 2021
Milutin Kovacev, Liping Shi, and Uwe Morgner
NTu3A.6 Nonlinear Optics (NLO) 2019