Author Affiliations

L. Urbanski,¹ P. Wachulak,¹ A. Isoyan,² F. Jiang,² Y. Cheng,² J. J. Rocca,¹ C. S. Menoni,^1,* M. C. Marconi,¹ and F. Cerrina^2,3

¹- NSF Engineering Research Center for Extreme Ultraviolet Science and Technology and Electrical and Computer Engineering Department. Colorado State University, Fort Collins, Colorado

²- Center for Nanotechnology, University of Wisconsin-Madison

³- Department of Electrical and Computer Engineering, University of Wisconsin-Madison

^*Corresponding author: marconi@engr.colostate.edu