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Conferences > FiO > 2011 > FMB > FMB2

Silicon Waveguide Fabry-Perot Cavity Formed by a Silicon Dioxide Cladding Grating

Richard R. Grote, Jeffrey B. Driscoll, Claudiu G. Biris, Nicolae C. Panoiu, and Richard M. Osgood

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Abstract

An integrated silicon waveguide Fabry-Perot cavity is fabricated by etching distributed Bragg reflectors with a quarter wave defect cavity into the silicon dioxide cladding. The measured transmission spectrum of the cavity agrees with theory.

© 2011 Optical Society of America

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