Abstract
We investigate and find that the quality of titanium nitride grown at 350°C and 375°C using atomic layer deposition on silicon and sapphire substrates respectively are approaching the metallicity of sputtered films.
© 2018 The Author(s)
PDF ArticleMore Like This
Ray Secondo, Vitaliy Avrutin, Ümit Özgür, and Nathaniel Kinsey
JTh2A.75 CLEO: Applications and Technology (CLEO:A&T) 2018
Manuel R. Ferdinandus, Jamie Gengler, Nathaniel Kinsey, and Augustine Urbas
JTu2A.130 CLEO: Applications and Technology (CLEO:A&T) 2018
Dhruv Fomra, Kai Ding, Vitaliy Avrutin, Ümit Özgür, and Nathaniel Kinsey
JW4A.123 Frontiers in Optics (FiO) 2019