Abstract
We explain the reduced basis method for the finite element simulation of nano optical problems which allows to obtain rigorous solutions of the electromagnetic field for large parameterized problems in very short time.
Rigorous electromagnetic field computations in practice often become very time consuming. The reduced basis (RB) method allows to split up the solution process of a (e.g. geometrically) parameterized problem into an expensive offline and a fast online part. For an actual simulation only the fast online part is evoked. We explain how to assemble the parameterized RB FEM system for scattering problems. Furthermore we compare different construction strategies of the RB and examine the convergence of the RB solution. Our application example is a parameterized phase shift mask.
© 2008 Optical Society of America
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