Enhancing Thermal Reconfiguration Speed for Silicon Photonics Applications

Amir H. Atabaki; Ali A. Eftekhar; Siva Yegnanarayanan; Ali Adibi

doi:10.1364/IPNRA.2009.IMC3

Advances in Optical Sciences Congress
OSA Technical Digest (CD) (Optica Publishing Group, 2009),
paper IMC3
•https://doi.org/10.1364/IPNRA.2009.IMC3

Enhancing Thermal Reconfiguration Speed for Silicon Photonics Applications

Amir H. Atabaki, Ali A. Eftekhar, Siva Yegnanarayanan, and Ali Adibi

Integrated Photonics and Nanophotonics Research and Applications 2009

Honolulu, Hawaii United States
12–17 July 2009
ISBN: 978-1-55752-873-5

From the session
Silicon Photonics and Hybrid Material Integrated Devices (IMC)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
A. H. Atabaki, A. A. Eftekhar, S. Yegnanarayanan, and A. Adibi, "Enhancing Thermal Reconfiguration Speed for Silicon Photonics Applications," in Advances in Optical Sciences Congress, OSA Technical Digest (CD) (Optica Publishing Group, 2009), paper IMC3.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

The reconfiguration speed of silicon photonic devices is enhanced by optimizing thin-film microheaters. We show theoretically and experimentally that narrower heaters, thinner buried oxide layers, and LPCVD SiN over-cladding can improve the reconfiguration speed.

PDF Article

Previous Article Next Article