Abstract

A grating coupler¹ is an attractive component in integrated optics for laser-beam application systems, such as laser-beam deflectors² and optical pick-up heads,³ because of its waveguide-air interface operation. However, mass production of grating couplers, which is necessary for practical use, has not yet been achieved because of the minute patterns having submicrometer-order periods. This paper reports a simultaneous fabrication of grating couplers and an optical waveguide by photopolymerization. This method is suitable for mass production.

© 1990 Optical Society of America