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Conferences > IPRSN > 2013 > IM3A > IM3A.2

Towards Large-scale Silicon Photonics Integration

Michael R. Watts

Open Access Open Access

Abstract

We present on the development of a 300mm silicon photonics platform incorporating multilevel copper interconnects, vertical junction modulators, germanium detectors, and silicon nitride layers. Within this platform, we demonstrate large-scale silicon photonic circuits.

© 2013 Optical Society of America

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