Abstract
The Readout properties and TEM microstructures of super-resolution near-field structure (Super-RENS) with nanocomposite mask layer (nanoparticles and nanorod) prepared by co-sputtering method were studied and demonstrated. The CNR of 100nm mark length is 40dB, which is measured by 635nm wavelength and 0.6 NA.
© 2005 Optical Society of America
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