Abstract

Semi–conductive microspheres, e.g., silicon microspheres, play an important role in photonics as whispering gallery mode micro-lasers [1]. Several methods to fabricate microspheres, such as chemical vapor decomposition and laser ablation, have been demonstrated, so far. The aforementioned methods enable the fabrication of the porous, polycrystalline microspheres, however, they are difficult to produce monocrystalline microspheres.

© 2016 Japan Society of Applied Physics, Optical Society of America