Abstract

Optical biosensors based on metasurfaces have received a lot of attention for their high sensitivity S, real-time monitoring capability, and simple measurement configuration. Plasmonic metasurfaces have high S values but high Ohmic loss, which leads to local heating and broad peaks[1]. Mie resonators made of low-loss crystalline silicon (c-Si) can support both electric dipole (ED) and magnetic dipole (MD) modes[2,3]. However, the S value of cylindrical Mie resonators is only 42 nm/RIU because the enhanced field is confined within the resonators[4].

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