Abstract

There are a variety of techniques employed for the microanalysis of materials. The majority of these techniques employ focused ions or electron beams to probe the materials. In recent years, a technique called Laser Microprobe Mass Spectrometry has been developed to provide a unique and complementary characterization capability. This paper will deal with the basic phenomena involved, instrumentation and illustrations of the technique's utility with a variety of applications.

© 1987 Optical Society of America