High-Efficiency Si3N4 Grating Coupler with Bottom Bragg Reflector for Micro-Transfer Printed InP Photodiodes

Laurens Bogaert; Laurens Bogaert; Gunther Roelkens; Gunther Roelkens

doi:10.1364/FIO.2023.JTu5A.17

Frontiers in Optics + Laser Science 2023 (FiO, LS)
Technical Digest Series (Optica Publishing Group, 2023),
paper JTu5A.17
•https://doi.org/10.1364/FIO.2023.JTu5A.17

High-Efficiency Si3N4 Grating Coupler with Bottom Bragg Reflector for Micro-Transfer Printed InP Photodiodes

Laurens Bogaert and Gunther Roelkens

Laser Science 2023

Tacoma, Washington United States
9–12 October 2023
ISBN: 978-1-957171-29-6

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Joint Poster Session III (JTu5A)

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L. Bogaert and G. Roelkens, "High-Efficiency Si3N4 Grating Coupler with Bottom Bragg Reflector for Micro-Transfer Printed InP Photodiodes," in Frontiers in Optics + Laser Science 2023 (FiO, LS), Technical Digest Series (Optica Publishing Group, 2023), paper JTu5A.17.

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Abstract

We present FDTD simulation results and a corner analysis for the design of Si3N4 grating couplers with embedded amorphous-Si/SiO₂ DBR bottom mirror providing up to 99.58% coupling efficiency at 1560nm to micro-transfer printed InP photodiodes.

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