Abstract
We demonstrate sputtering-GaN resonators on the silicon-based substrate. By employing high-power impulse magnetron sputtering, waveguide resonators with quality factor 4×104 can be achieved. This work highlights the potentials for fabricating GaN waveguides using CMOS-compatible processes.
© 2023 The Author(s)
PDF ArticleMore Like This
Andreas Frigg, Andreas Boes, Guanghui Ren, Duk-Yong Choi, Silvio Gees, and Arnan Mitchell
ce_p_38 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2019
Shuangyou Zhang, Toby Bi, Irina Harder, Olga Lohse, Florentina Gannott, Alexander Gumann, Yaojing Zhang, and Pascal Del’Haye
ck_5_1 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023
Lala Rukh, Gabriel Colacion, and Tara Drake
JTh2A.134 CLEO: Applications and Technology (CLEO:A&T) 2023