Abstract
We present 3D laser lithography of arbitrary shaped microoptical elements. Their quality, functionality and resiliency to intense femtosecond laser radiation is investigated quantitatively and qualitatively. Ways to increase throughput while maintaining surface quality are proposed.
© 2019 The Author(s)
PDF ArticleMore Like This
Dovilė Mackevičiūtė, Linas Jonušauskas, Tomas Baravykas, Tomas Gadišauskas, Darius Gailevičius, and Mangirdas Malinauskas
cm_p_37 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2019
Karolis Galvanauskas, Rokas Žvirblis, Giedrius Balčas, Darius Gailevičius, Darija Astrauskytė, Lina Grinevičiūtė, and Mangirdas Malinauskas
ce_11_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023
Ingo Sieber, Daniel Moser, and Ulrich Gengenbach
JW3A.2 Freeform Optics (Freeform) 2019