Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > MICS > 2024 > MTh2C > MTh2C.4

Control of nonlinearity enables 3D silicon processing

M. Demesh, N. Tolstik, E. Sorokin, V.L. Kalashnikov, A. Rudenkov, E. Einmo, M. Di Sabatino, and I.T. Sorokina

Not Accessible

Your library or personal account may give you access

Abstract

We demonstrate effective control of the shape and depth of sub-wavelength-sized structures in silicon through repeatable single pulse modifications at the optimum wavelength of 2.1 μm, which provides a balance of Kerr-effect and multi-photon absorption.

© 2024 The Author(s)

PDF Article
More Like This
Depressed cladding buried waveguide lasers: single-crystal vs. polycrystalline Cr:ZnS

M. Demesh, E. Sorokin, E. Einmo, Ch. Grivas, N. Tolstik, A.G. Okhrimchuk, M. P. Smayev, V.V. Likhov, V.L. Kalashnikov, Ch. Brüne, M. Di Sabatino, and I.T. Sorokina
JW4A.4 Compact EUV & X-ray Light Sources (EUVXRAY) 2024

Laser Writing Deep inside Silicon for 3D Information Processing

O. Tokel, A. Turnalı, I. Pavlov, and F. Ö. Ilday
CK_P_34 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2015

Energy Scalability Limits of mid-IR Femtosecond Pulse Oscillators

Vladimir L. Kalashnikov, Alexander Rudenkov, Evgeni Sorokin, and Irina T. Sorokina
MTh4C.1 Mid-Infrared Coherent Sources (MICS) 2024

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use