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Conferences > NTM > 2009 > JTuA > JTuA2

Digital Holography for MEMS Application

Anand Asundi and Vijay Raj Singh

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Abstract

Studies on digital holographic microscopy system for full-field high resolution 3D profiling of MEMS and micro-devices are presented in this paper. Applications of the system for thickness measurements of thin film and analysis of accelerometer device are presented.

© 2009 Optical Society of America

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