Abstract
Selected optical materials were deposited using combined ion beam sputter and ion-assisted deposition techniques. The influence of ion energy and current density on the properties of a growing film is discussed. Measured properties include optical constants, mechanical properties, microstructure, and stoichiometry. Optical materials include zirconia, titania, silica, aluminum nitride, and silicon nitride. Recent roughness measurements on ion sputter deposited over coated aluminum films are discussed.
© 1985 Optical Society of America
PDF ArticleMore Like This
Jin-Cherng Hsu, Cheng-Chung Lee, Jiun-Horng Lin, Hong-Jung King, and David T. Wei
MB.8 Optical Interference Coatings (OIC) 1998
J. J. McNally, G. A. Al-Jumaily, and J. R. McNeil
FL5 OSA Annual Meeting (FIO) 1985
J. D. Targove and L. G. Sills
TuPP1 OSA Annual Meeting (FIO) 1991