Abstract
Fresnel zone plate lenses with outer zone widths of 40 nm have been used to image various nanostructure patterns with a spatial resolution approaching 50 nm (0.05 µm). Radiation at 4.5-nm wavelength was utilized at the BESSY synchrotron facility in Berlin using the Gottingen x-ray microscope.12 The test patterns include periodic line structures, circular structures, and various patterns associated with a 0.1-µm test circuit. Feature sizes of the test patterns are well resolved at 60 nm.
© 1988 Optical Society of America
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