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Investigation of the origin of microroughness in multilayer coatings through variation in the degree of isotropy

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Abstract

Scattering in optical multilayers is a current problem. These losses are essentially due to the interface roughnesses of the coatings, and it is therefore important, for minimization of scattering, to have a good knowledge of the origin of microroughness: substrate quality, effect of materials, conditions and techniques of production. Much work has been done but, because of the number of parameters, the conclusions are often difficult and always relative to integrated values (roughness, global scattering, mean section of angular scattering). We show that the use of a causal model together with isotropy degree variations permits a detailed investigation of microroughness and leads to clear conclusions.

© 1989 Optical Society of America

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