Abstract
The coevaporation of LaF3 and BaF2 has been investigated as a means of reducing the large intrinsic tensile stress of fluoride films deposited at ambient temperature. CeF3 and BaF2 have previously been coevaporated from a single source for stress reduction.1 We have used coevaporation from separate sources for increased composition control and to allow separate deposition rate control for the two materials as a means of depositing gradient-index films. LaF3 was chosen as a UV transmissive material with chemical properties identical to CeF3. Refractive indices of the films decreased significantly. Gradient-index films with sinusoidal index profiles were then deposited by varying the BaF2 deposition rate while maintaining the LaF3 rate constant. This method thus allows gradient-index films with reduced stress to be deposited at wavelengths from the ultraviolet to the infrared.
© 1989 Optical Society of America
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