Abstract

The usual description of imaging in a microscope is based on scalar diffraction theory and on some approximations to model the interaction of the electromagnetic field and the object. The validity of this description becomes suspect when there is structure in the object comparable to the wavelength of light and when the object is optically thick (< λ/4). Unfortunately, these cases are of interest in many practical applications, such as the inspection and metrology of integrated circuits.

© 1990 Optical Society of America