Abstract

The performance of soft-x-ray optics in synchrotron beam lines and for space astronomy use requires detailed knowledge of the topological properties of their surfaces. Instrumentation now exists for the measurement of surface profiles on spherical and aspherical surfaces up to one meter in length with subnanometer height resolution and submicroradian slope resolution. Analysis of surface profile data in terms of the power spectral density function over the entire range of spatial periods—from micrometers to meters—allows one to predict the performance of the component in a unified theoretical approach encompassing both the specular image and scattered light distribution. There is no longer any need for an artificial distinction between surface figure and surface finish. We will discuss numerous examples of actual surface profile measurements on grazing incidence and normal incidence optics, and we will relate them to measured performance at x-ray wavelengths where possible.

© 1990 Optical Society of America