Abstract
For the mastering system of high-density Read-Only-Memory discs, a laser beam recorder equipped a Solid Immersion Lens and an electron beam recorder have been reported1) 2). However, the precise gap control between a head and a blank substrate and the sophisticated control of environment are needed, thus these systems are expected to be expensive. Furthermore, the systems require highly flat blank substrates. Recently thermal recording on transition metal oxide, called the Phase Transition Mastering, has been proposed3). However, it needs an additional deposition apparatus of the material.
© 2003 Optical Society of America
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