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Conferences > OFC > 2001 > WX > WX2
  • Optical Fiber Communication Conference and International Conference on Quantum Information
  • 2001 OSA Technical Digest Series (Optica Publishing Group, 2001),
  • paper WX2
  • •https://doi.org/10.1364/OFC.2001.WX2

MEMS Electrostatic Actuators for Optical Switching Applications

John D. Grade and Hal Jerman

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Abstract

Electrostatic actuators providing linear and angular deflection have been developed using Deep Reactive Ion Etching (DRIE). Optical switches with 0.5 dB loss at 1550 nm have been made showing switching times less than 5 ms.

© 2001 Optical Society of America

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