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Ultra-low loss and fabrication tolerant silicon nitride (Si3N4) (de-)muxes for 1-μm CWDM optical interconnects

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Abstract

Low-loss, fabrication-tolerant Si3N4 CWDM lattice filters and AWGs are demonstrated for 990 – 1065nm bottom-emitting VCSELs. Channel separation of 25 nm, XT < -35 dB and −20 dB are reported with temperature shift of 14.5 pm/°C.

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