Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers

Kenneth M. Jabon; Christopher V. Poulton; Ren-Jye Shiue; Matthew J. Byrd; Zhan Su; Mohammad H. Teimourpour; Scott Breitenstein; Ronald P. Millman; Dogan Atlas; Michael R. Watts; Erman Timurdogan

doi:10.1364/OFC.2021.M3A.1

Optical Fiber Communication Conference (OFC) 2021
OSA Technical Digest (Optica Publishing Group, 2021),
paper M3A.1
•https://doi.org/10.1364/OFC.2021.M3A.1

Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers

Kenneth M. Jabon, Christopher V. Poulton, Ren-Jye Shiue, Matthew J. Byrd, Zhan Su, Mohammad H. Teimourpour, Scott Breitenstein, Ronald P. Millman, Dogan Atlas, Michael R. Watts, and Erman Timurdogan

Optical Fiber Communication Conference 2021

Washington, DC United States
6–11 June 2021
ISBN: 978-1-943580-86-6

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Silicon Photonics in Communications and Beyond (M3A)

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K. M. Jabon, C. V. Poulton, R. Shiue, M. J. Byrd, Z. Su, M. H. Teimourpour, S. Breitenstein, R. P. Millman, D. Atlas, M. R. Watts, and E. Timurdogan, "Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers," in Optical Fiber Communication Conference (OFC) 2021, P. Dong, J. Kani, C. Xie, R. Casellas, C. Cole, and M. Li, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper M3A.1.

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Abstract

We perform wafer-scale measurements of silicon photonics components using broadband (100nm+) edge couplers and reflecting optical fiber probes for the first time. We demonstrate <1dB/cm waveguide loss and 25GHz+ micro-ring modulators on 300mm wafers.

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